Micro-Optical MEMS, micro-mirros and pico-projectors
Bilateral ITE and Wroclaw University of Technology Workshop on Micro-Optical MEMS took place in ITE labs on February 15-16 2017.
The 2-days Workshop was organized at ITE labs (Division of Silicon Microsystem and Nanostructure Technology). Over 15 participants from both institutions took part in the Workshop. During the Workshop the MEMS/MOEMS metrology and Lab4MEMS-II project related topics were presented and discussed. Students attending the Workshop had an unique opportunity to “touch” a real MEMS/MOEMS devices and perform set of experiments on sensors systems set-up in ITE labs. The demonstration of MEMS/NEMS/MOEMS devices developed within LAB4MEMS-II was performed. At the end of the second day of the event, the lab tour at ITE clean-room facility was organized.
The list of presentations during the first workshop day: