Micro-Optical MEMS, micro-mirros and pico-projectors


Project overview

Lab4MEMS II will feature the Pilot Line for innovative technologies on advanced Micro-Opto-Electro-Mechanical Systems (MOEMS). This is not just a special class of MEMS systems in fact, but it deals with MEMS merged with Micro-optics, which involves sensing or manipulating optical signals on a very small size scale, using integrated mechanical, optical, and electrical systems. MOEMS includes a variety of devices including optical switch, array of micro-mirrors, optical cross-connect, lasers and micro lens amongst others. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, molybdenum (Mo), silicon dioxide, silicon nitride (Si3N4), piezo coating, etc…

The key findings, including MOEMS sensor’s process, design, methodology and manufacturing will be established and evaluated by means of highly impacting technology demonstrators and use-cases.

The Demonstration strategy of Lab4MEMS II is two-fold:

  • A suite of "proof-of-concepts" will be delivered and assessed at midterm as intermediate demonstration vehicles to prove the actual feasibility of initial device solutions, wafer substrates, process steps, tools or equipment.
  • The work-flow will then converge and optimize the set of four Final Technology Demonstrators intended to become the flagship test vehicles to demonstrate the Lab4MEMS II KET Pilot Line.

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