Micro-Optical MEMS, micro-mirros and pico-projectors
Lab4MEMS II will feature the Pilot Line for innovative technologies on advanced Micro-Opto-Electro-Mechanical Systems (MOEMS). This is not just a special class of MEMS systems in fact, but it deals with MEMS merged with Micro-optics, which involves sensing or manipulating optical signals on a very small size scale, using integrated mechanical, optical, and electrical systems. MOEMS includes a variety of devices including optical switch, array of micro-mirrors, optical cross-connect, lasers and micro lens amongst others. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, molybdenum (Mo), silicon dioxide, silicon nitride (Si3N4), piezo coating, etc…
The key findings, including MOEMS sensor’s process, design, methodology and manufacturing will be established and evaluated by means of highly impacting technology demonstrators and use-cases.
The Demonstration strategy of Lab4MEMS II is two-fold: