Micro-Optical MEMS, micro-mirros and pico-projectors
Commissariat Al Energie Atomique Et Aux Energies Alternatives
CEA (Atomic Energy Commission) is a French Governmental Research Organisation (15000 employees) devoted to both fundamental and industrial R&D. CEA-LETI is one of the major European research centers for applied electronics. More than 85% of its activity is dedicated to research finalized with external partners. Nearly 1,600 men and women are serving innovation and the transfer of technology in key domains. As the preferred contact of the industrial world, CEA-LETI has sparked the creation of nearly thirty high-technology startups, including Soitec, world leader in silicon on insulator CEA-Leti is located in Grenoble where it benefits from 11000 m2 state-of- the-art clean rooms including pilot lines dedicates to 200 mm IC, 300 mm IC and 200 mm MEMS fabrication, with equipment worth some 200 M€ (40 M€ are invested each year to maintain the equipment park). The yearly CEA-Leti budget was 250 M€ in 2011. Leti is one of the main groups behind Minatec, Europe’s main Centre of Excellence in Micro- and Nano-technology, that brings together more than 4,000 people from research, industry and education partners in Grenoble.
Previous experience relevant to tasks: “MOEMS” is a well-established activity at CEA-LETI with already important achievements obtained with prestigious laboratories and companies under both publicly funded and direct bilateral, industrial contracts. CEA-LETI was involved in several the IST-FP6 and ICT-FP7 projects and it has produced more than 400 publications and papers and 75 patents. CEA will use the 200 mm MEMS fabrication facilities for the fabrication of all devices.
Main role in the project:
CEA will collaborate with ARK on the definition and test of new electro-active polymers to be used for MOEMS actuation. These polymers will be integrated and tested by CEA on simple micro-mirrors actuators.
Dr. Fabrice CASSET
Dr. Stephane FANGET