Micro-Optical MEMS, micro-mirros and pico-projectors







Partner profile:

ICOS, a division of KLA-Tencor, makes optical inspection tools for the semiconductor industry with main application in the back-end and has its headquarters in Leuven, Belgium. The company was founded in 1982 and in 2008 ICOS was acquired by the US based company KLA-Tencor (KT), which is specialized in semiconductor front-end inspection. KT-ICOS now operates as a wholly-owned subsidiary of KLA-Tencor with about 80 FTE based in Belgium of which about 60 working in R&D. The main product line is the ICOS component inspection (CI) machine. The ICOS CI-machine does 2D and 3D metrology and inspection of substrates and packaged components such as processors or memories, measuring among others ball height and detecting scratches on the package.

KT-ICOS is market leader with its component inspector product-line and has 70% share in CI market in the package assembly lines (tray-to-tray handling) and more than 40 % in package test lines (tray-to-tape).

KT-ICOS performs continuous research to improve current product line and develop new products. It has led and has been involved in many public funded research projects. Key inventions are protected through more than 15 patent families.


Main role in the project:

Metrology, inspection and handling equipment’s for the Pilot Lines. KLA is WP3 Leader.


Key Persons:

Dr. Maarten van der Burgt

Karel van Gils






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